Cost Effective, Configurable Test Platform
The QS-TMC-2100 is an innovative, configurable, cost effective high performance test and measurement platform solution deploying Q-Star instruments and serving a variety of test and measurement applications. The platform uses a DLL based approach in combination with high performance functions and embedded execution scripts. This allows users to easily develop their own approaches, for example rapidly and efficiently characterizing the intrinsic process reliability and device quality of integrated circuits. As a configurable, multi-channel, flexible and dedicated semiconductor qualification and reliability characterization system that easily interfaces with a variety of test structures such as single devices, wafer-level test structures, and dedicated test chips, QS-TMC-2100 accelerates the testing of semiconductor devices in volume.
QS-TMC-2100 Modules
- CPU Module (system “Conductor”)
- 4 Channel SMU Module
- Each channel can be configured and operated independently
- Module design supports FVMI – FVMI/FC – FVFCMIMV operation
- 3 selectable current measurement ranges
- 4K local data memory per channel
- 2 Channel digitizing module
- Each channel combines a slow (10µs sampling) and fast (500ns sampling) voltmeter than run concurrently
- 4K (slow VM)/20K (fast VM) data memory per channel
- Configurable range and input selection for each channel
- differential/single ended
- 10V-5V-2V-1V
- 2 Channel heater control SMU with constant power regulation
- 0-2.5V-150mA
- TC Control unit
- 24 bit digital interface – preconfigured I/O direction
- Output level shifters
Competitive Position
| Keithley 2600 | Keysight B1500 | QS-TMC-2100 | |
|---|---|---|---|
| Dimensions(dm3) | 8.72 – 11.39 | 79.7 | 2.79 |
| # of SMUs | 2 | Up to 10 | Up to 48 |
| Max measurement rate (Mps) | 1.9K single 20K sweep | 100K – 1M | 100K current 2M voltage |
| Voltage Measurement Performance (ENOB) | 8.7 – 10.7 | 10.8 – 12.4(HR) 9.8 – 11 (HS) 8.8 (WGFMU) |
14(@2MHz) >16(@100KHz) |
| Current Measurement Performance (ENOB) | 9 – 10.8(DC) 7.5 – 9(fast) | 10 – 11.7(HR) 8.6 – 11.3(HS) 8(WGFMU) |
14 – >16(typ) 11 – 14(fast) |